Universal Mems Platforms for Passive Rf’ Components: Suspended Inductors and Variable Capacitors
نویسندگان
چکیده
We propose a universal MEMS technology platform for fabricating integrable passive components for radio frequency (RF) integrated circuits. This platform is based on a novel surface-micromachined MicroElevator by Self-Assembly (MESA) techque. Both high-Q inductors and variable capacitors can be realized by the MESA technology. A surface-micromachined spiral inductor that is raised by 250 pm above the Si substrate has been experimentally demonstrated. The suspended inductor has less parasitic capacitance and substrate loss, and higher quality (Q) value and resonant frequency. The inductance of a 12.5-turn inductor is measured to be 24 nH. The results show that the selfassembled passive RF elements are suitable for monolithic integration.
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